Minimizing Artifacts in Analysis of Surface Statistics

Peter Z. Takacs

doi:10.1364/OFT.2012.OTu1D.5

Imaging and Applied Optics Technical Papers
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper OTu1D.5
•https://doi.org/10.1364/OFT.2012.OTu1D.5

Minimizing Artifacts in Analysis of Surface Statistics

Peter Z. Takacs

Optical Fabrication and Testing 2012

Monterey, California United States
24–28 June 2012
ISBN: 1-55752-947-7

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Optical Testing I (OTu1D)

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P. Z. Takacs, "Minimizing Artifacts in Analysis of Surface Statistics," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper OTu1D.5.

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Abstract

Measurements from interferometers and profilometers contain information about surface figure and finish over a wide range of spatial frequencies. Proper detrending and windowing are necessary to avoid contaminating the true nature of the PSD function.

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