Abstract
In this paper the mathematical representation of spatial mid-frequencies resulting from sub-aperture polishing of aspherical optical surfaces is discussed. While for rotationally symmetric structures a one dimensional Power Spectral Density function (PSD) is sufficient, a two dimensional PSD is needed to represent non-rotationally symmetric surface structures as they usually occur in raster mode shape corrections of high end aspherical surfaces. In addition it is suggested, to compute the PSD of the tool footprint allowing to predict its cut-off frequency, i.e. the highest frequency removable from the surface applying this footprint. Finally examples are presented showing the possibility during Fluid Jet Polishing (FJP) to remove spatial mid-frequencies that are left on the surface during sub-aperture polishing by applying a footprint that has a smaller diameter.
© 2010 OSA, SPIE
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