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Optica Publishing Group
  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OMB5
  • https://doi.org/10.1364/OFT.2010.OMB5

Pixel-based computations in optical metrology

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Abstract

Advances in computer hardware and software tools are closely associated with advances in optics. The computational power available in modern computers and tools such as Matlab™ and LabVIEW™ make it possible to perform pixel-based computations on image data in optical metrology, rather than immediately fitting to a set of polynomials. Two examples of pixel-based computations that have only recently become practical are calibration of an interferometer, and stitching of interferometry data. However, computers are not so powerful that one can afford to be inefficient, even when processing data sampled in only one dimension, rather than image data sampled in two dimensions.

© 2010 OSA, SPIE

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