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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OThC7
  • https://doi.org/10.1364/OFT.2008.OThC7

Ion Beam Figuring (IBF) solutions for the correction of surface errors of small high Performance Optics

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Abstract

Ultra precise figure error correction of small optics down to the sub-nm RMS level as well as for a time-saving figure error correction with nm-RMS accuracy by using the new IBF-100 plant

© 2008 Optical Society of America

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