New Metrics for Polishing Pitch

B. Mullany; E. Corcoran

doi:10.1364/OFT.2008.OFA5

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper OFA5
•https://doi.org/10.1364/OFT.2008.OFA5

New Metrics for Polishing Pitch

B. Mullany and E. Corcoran

Optical Fabrication and Testing 2008

Rochester, New York United States
21–24 October 2008
ISBN: 978-1-55752-861-2

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Polishing and Figuring (OFA)

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B. Mullany and E. Corcoran, "New Metrics for Polishing Pitch," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper OFA5.

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Abstract

Polishing pitch is evaluated in the frequency domain. Both the testing technique and results are presented. Frequency domain testing results can be correlated to indentation tests. The shop floor value of the test is discussed.

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