Recent Advances in White-Light Interferometry -Speed Improvement and Transparent Film Profiling-

Katsuichi Kitagawa

doi:10.1364/OFT.2006.OFWD1

Frontiers in Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2006),
paper OFWD1
•https://doi.org/10.1364/OFT.2006.OFWD1

Recent Advances in White-Light Interferometry -Speed Improvement and Transparent Film Profiling-

Katsuichi Kitagawa

Optical Fabrication and Testing 2006

Rochester, New York United States
9–11 October 2006
ISBN: 1-55752-818-7

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Testing II (OFWD)

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K. Kitagawa, "Recent Advances in White-Light Interferometry -Speed Improvement and Transparent Film Profiling-," in Frontiers in Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2006), paper OFWD1.

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Abstract

Two major shortcomings in white-light interferometric surface measurement are 1) slow measurement speed, and 2) error caused by a transparent film on the surface. This paper introduces new developments to solve these problems.

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