Effect of Rogue Particles on the Sub-Surface Damage of Fused Silica during Grinding/Polishing

T. Suratwala; R. Steele; M. D. Feit; L. Wong; P. Miller; J. Menapace; P. Davis

doi:10.1364/OFT.2006.OFTuD1

Frontiers in Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2006),
paper OFTuD1
•https://doi.org/10.1364/OFT.2006.OFTuD1

Effect of Rogue Particles on the Sub-Surface Damage of Fused Silica during Grinding/Polishing

T. Suratwala, R. Steele, M. D. Feit, L. Wong, P. Miller, J. Menapace, and P. Davis

Optical Fabrication and Testing 2006

Rochester, New York United States
9–11 October 2006
ISBN: 1-55752-818-7

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Grinding and Polishing (OFTuD)

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T. Suratwala, R. Steele, M. D. Feit, L. Wong, P. Miller, J. Menapace, and P. Davis, "Effect of Rogue Particles on the Sub-Surface Damage of Fused Silica during Grinding/Polishing," in Frontiers in Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2006), paper OFTuD1.

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Abstract

The sub-surface damage formed during the grinding/polishing of silica glass with rogue particle additions to the slurry has been characterized. The damage depth was found to increase with even small amounts of rogue particle additions.

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