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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OMA3
  • https://doi.org/10.1364/OFT.2004.OMA3

Frequency-Scanning Interferometry

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Abstract

Interferometry using a frequency scanned source offers the ability to make precision measurements of both diffuse and specular objects with large surface deviations over large fields of view. In this paper we discuss the basics of frequency-scanning interferometry and compare it to conventional laser interferometry and white-light interferometry.

© 2004 Optical Society of America

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