High-resolution micromeasurement with digital holography

Lei Xu; Xiaoyuan Peng; Jianmin Miao; Anand Asundi

doi:10.1364/OFT.2002.OWD11

Optical Fabrication and Testing
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002),
paper OWD11
•https://doi.org/10.1364/OFT.2002.OWD11

High-resolution micromeasurement with digital holography

Lei Xu, Xiaoyuan Peng, Jianmin Miao, and Anand Asundi

Optical Fabrication and Testing 2002

Tucson, Arizona United States
3–5 June 2002
ISBN: 1-55752-719-9

From the session
Metrology Poster Preview (OWD)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
L. Xu, X. Peng, J. Miao, and A. Asundi, "High-resolution micromeasurement with digital holography," in Optical Fabrication and Testing, A. Sawchuk, ed., Vol. 76 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002), paper OWD11.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Digital holography is studied on system configuration and microscopic scheme for realizing high-resolution micromeasurement. The proposed system is examined experimentally in lateral resolution, measurement sensitivity and microscopic resolution respectively with application to microstructure testing.

PDF Article

More Like This

Pulsed Digital Holography with High Spatial Resolution

Hongchen Zhai, Caojin Yuan, and Xiaolei Wang
WJ3_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2009

Dual-comb digital holography with high spectral resolution

Edoardo Vicentini, Zhenhai Wang, Kasper van Gasse, Theodor W. Hänsch, and Nathalie Picqué
SM1G.1 CLEO: Science and Innovations (CLEO:S&I) 2021

Analysis and Experimental Achievement of High Resolution Imaging in Digital Holography

Jianlin Zhao, Hongzhen Jiang, and Jianglei Di
DSu3C.1 Digital Holography and Three-Dimensional Imaging (DH) 2012