Abstract
We report the application of magnetorheological finishing (MRF) to the polishing of optical polymers. MR fluids with moderated removal rates were evaluated for acrylic, polystyrene, and polycarbonate, with emphasis on pre-polished and diamond-turned cyclic olefin copolymer (COC).
© 2002 Optical Society of America
PDF ArticleMore Like This
William Kordonski, Don Golini, Stephen Hogan, and Andy Price
OMA1 Optical Fabrication and Testing (OF&T) 2002
Don Golini, Paul Dumas, William Kordonski, Stephen Hogan, and Stephen Jacobs
OMD.1 Optical Fabrication and Testing (OF&T) 1998
Don Golini, Steve Jacobs, Yiyang Zhou, Ed Fess, and Mark Atwood
OF98 Extreme Ultraviolet Lithography (EUL) 1996