Abstract

The computer-generated hologram based interferometry has become the most used method in testing of non-spherical optical surfaces. This paper treats the aspects of the sensitivity analysis of a particular interferometric setup conceived to measure a sub F/l very deep aspheric surface. After the principles of sensitivity analysis are discussed, a practical method to improve the measurement accuracy is proposed. As the sensitivity analysis has been performed using two optical design programs, a comparative table of sensitivity is given as well as a series of interferograms showing how the different setup alignment or/and positioning errors affect the measurement accuracy.

© 2000 Optical Society of America