Optical MEMS for Sensing Applications

Ming C. Wu

doi:10.1364/OFS.1997.OTuA2

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Conferences > OFS > 1997 > OTuA > OTuA2

12th International Conference on Optical Fiber Sensors
1997 OSA Technical Digest Series (Optica Publishing Group, 1997),
paper OTuA2
•https://doi.org/10.1364/OFS.1997.OTuA2

Optical MEMS for Sensing Applications

Ming C. Wu

Author Information

Author Affiliations

Ming C. Wu

UCLA

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M Wu

Optical Fiber Sensors 1997

Williamsburg, Virginia United States
ISBN: 1-55752-485-8

From the session
Plenary Session (OTuA)

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M. C. Wu, "Optical MEMS for Sensing Applications," in 12th International Conference on Optical Fiber Sensors, Vol. 16 of 1997 OSA Technical Digest Series (Optica Publishing Group, 1997), paper OTuA2.

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Related Topics
Optics & Photonics Topics
?

The topics in this list come from the Optics and Photonics Topics applied to this article.
- Microoptoelectromechanical systems
- Optical sensing

Abstract

Abstract

We will review the current state of the art of the optical MEMS (micro electro mechanical systems) technology for sensing applications.

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Optical Fiber Sensors 1997
Williamsburg, Virginia United States
ISBN: 1-55752-485-8
From the session Plenary Session (OTuA)

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