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Conferences > OFS > 1997 > OThD > OThD1

Optical Monitoring of Film Thickness using Low-Coherence Reflectometry

W. V. Sorin, S. Venkatesh, and B. L. Heffner

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Abstract

Monitoring or sensing of film thickness 1s an important measurement in the manufacturing process of plastic films.

© 1997 Optical Society of America

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