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Optica Publishing Group
  • Optical Fiber Sensors
  • Collected Papers of the International Conferences on Optical Fiber Sensors 1983-1997 (Optica Publishing Group, 1992),
  • paper Th34
  • https://doi.org/10.1364/OFS.1992.Th34

Optical Displacement Sensor By Focus Error Detection

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Abstract

The non-contact measurement of three dimensional profiles or minute displacement is important in many fields, including the assembly of various optical components. We have developed a small optical displacement sensor by using polarization maintaining optical fiber as a laser beam guide within 0.1μm reproducibility using focus error detection techniques. We used the critical angle method1 for focus error detection.

© 1992 Optical Society of America

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