Abstract

Grating components have great potentiality in constructing integrated-optic sensors, since a grating can convert an input wavefront to the required one. It is possible to let a grating component have many functions simultaneously, so that the sensing operation can be achieved by integrating a few kinds of grating components. The grating optics can be fabricated by the planar process and be integrated with photodiodes on a Si substrate. This paper describes the design and fabrication of the gratings for the construction of integrated-optic sensors in the thin-film waveguide on a Si substrate.

© 1986 Optical Society of America