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Conferences > OFC > 2021 > Th5A > Th5A.3

MOSCAP Ring Modulator with 1.5 µm Radius, 8.5 THz FSR and 30 GHz/V Shift Efficiency in a 45 nm SOI CMOS Process

Hayk Gevorgyan, Anatol Khilo, Mark T. Wade, Vladimir M. Stojanović, and Miloš A. Popović

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Abstract

We demonstrate the smallest microring modulator to date, with 1.5 µm radius, record 8.5 THz FSR and 30 GHz/V O-band shift efficiency, using a MOSCAP structure in a new 45 nm monolithic CMOS electronic-photonic process (45CLO). It could enable massively-parallel optical links with low energy and high bandwidth density.

© 2021 The Author(s)

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