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Conferences > OFC > 2021 > F2C > F2C.1

Monolithic Integration of III-V/Si Hybrid MOS Optical Phase Shifter and InGaAs Membrane Photodetector

Shuhei Ohno, Stéphane Monfray, Frederic Boeuf, Kasidit Toprasertpong, Shinichi Takagi, and Mitsuru Takenaka

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Abstract

We present proof-of-concept monolithic integration of III-V/Si hybrid MOS optical phase shifter and InGaAs membrane photodetector for Si programmable photonic integrated circuits. We demonstrated responsivity of > 1.0 A/W at O-band owing to avalanche amplification.

© 2021 The Author(s)

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