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MWIR Solid-State Optical Phased Array Beam Steering using Germanium-Silicon Photonic Platform

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Abstract

We demonstrate a chip-scale germanium-silicon optical phased array fabricated on a Bi-CMOS compatible platform capable of beam steering in the mid-infrared wavelength. We achieved beam steering angle up to 12.7° with beam divergence of 0.47°×2.86°.

© 2019 The Author(s)

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