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Conferences > OFC > 2018 > Tu3A > Tu3A.2

Ultra-Low Loss Silicon Oxynitride (SiOxNy) Quantum Photonic Platform

Soon Thor Lim, Alagappan Gandhi, Thomas Ang, Junrong Ong, Ching Eng Png, Ding Lu, Norman Soo Seng Ang, Ee Jin Teo, and Jinghua Teng

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Abstract

SiOxNy shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss <1dB and <3dB total loss (<2dB on-chip loss and <1dB coupling loss) at 1310nm.

© 2018 The Author(s)

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