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A CMOS-compatible Low Back Reflection Grating Coupler for On-chip Laser Sources Integration

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Abstract

We demonstrate a low back reflection grating coupler on a SOI CMOS-compatible process designed for vertical integration of on-chip laser sources. It showed <-26dB back reflection and 1.9dB coupling loss to a 4-μm-diameter laser mode.

© 2016 Optical Society of America

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