Recent Progress in Silicon Photonics R&amp;D and Manufacturing on 300mm Wafer Platform

F. Boeuf; S. Cremer; E. Temporiti; M. Fere’; M. Shaw; N. Vulliet; B. Orlando; D. Ristoiu; A. Farcy; T. Pinguet; A. Mekis; G. Masini; P. Sun; Y. Chi; H. Petiton; S. Jan; J. R. Manouvrier; C. Baudot; P. Le Maitre; J-F. Carpentier; L. Salager; M. Traldi; L. Maggi; D. Rigamonti; C. Zaccherini; C. Elemi; B. Sautreuil; L. Verga

doi:10.1364/OFC.2015.W3A.1

Optical Fiber Communication Conference
OSA Technical Digest (online) (Optica Publishing Group, 2015),
paper W3A.1
•https://doi.org/10.1364/OFC.2015.W3A.1

Recent Progress in Silicon Photonics R&D and Manufacturing on 300mm Wafer Platform

F. Boeuf, S. Cremer, E. Temporiti, M. Fere’, M. Shaw, N. Vulliet, B. Orlando, D. Ristoiu, A. Farcy, T. Pinguet, A. Mekis, G. Masini, P. Sun, Y. Chi, H. Petiton, S. Jan, J. R. Manouvrier, C. Baudot, P. Le Maitre, J-F. Carpentier, L. Salager, M. Traldi, L. Maggi, D. Rigamonti, C. Zaccherini, C. Elemi, B. Sautreuil, and L. Verga

Optical Fiber Communication Conference 2015

Los Angeles, California United States
22–26 March 2015
ISBN: 978-1-55752-937-4

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Silicon Photonics II (W3A)

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F. Boeuf, S. Cremer, E. Temporiti, M. Fere’, M. Shaw, N. Vulliet, B. Orlando, D. Ristoiu, A. Farcy, T. Pinguet, A. Mekis, G. Masini, P. Sun, Y. Chi, H. Petiton, S. Jan, J. R. Manouvrier, C. Baudot, P. Le Maitre, J. Carpentier, L. Salager, M. Traldi, L. Maggi, D. Rigamonti, C. Zaccherini, C. Elemi, B. Sautreuil, and L. Verga, "Recent Progress in Silicon Photonics R&D and Manufacturing on 300mm Wafer Platform," in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optica Publishing Group, 2015), paper W3A.1.

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Abstract

A low cost 28Gbits/s Silicon Photonics platform using 300mm SOI wafers is demonstrated. Process, 3D integration of Electronic and Photonic ICs, device performance, circuit results and low cost packaging are discussed.

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