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An Ultra Low Power 3D Integrated Intra-Chip Silicon Electronic-Photonic Link

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Abstract

A record low energy (250fJ/bit) intra-chip electronic-photonic link is demonstrated at 5Gb/s on a 3D-integrated wafer using through-oxide-vias (1.45fF-per-via) for the first time. The receiver sensitivity was −19.3dBm and the on-chip laser energy was 6fJ/bit.

© 2015 Optical Society of America

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