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A compact and alignment-tolerant Si polarization rotator for rib and channel waveguides

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Abstract

A compact (around 10µm long) and alignment-tolerant (no performance degradation under a misalignment of a waveguide width, typically >300nm ) polarization rotator with a single-sided slab is proposed by using two-step self-aligned photolithography.

© 2014 Optical Society of America

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Poster Presentation

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