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Conferences > OFC > 2014 > M2K > M2K.2

Monolithic 50×50 MEMS Silicon Photonic Switches with Microsecond Response Time

Sangyoon Han, Tae Joon Seok, Niels Quack, Byung-wook Yoo, and Ming C. Wu

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Abstract

We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.

© 2014 Optical Society of America

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