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Optica Publishing Group
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013
  • OSA Technical Digest (online) (Optica Publishing Group, 2013),
  • paper OTu2C.6
  • https://doi.org/10.1364/OFC.2013.OTu2C.6

Optical Waveguides and Photodiodes in 0.18µm CMOS SOI with No Post-processing

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Abstract

We demonstrate the first optical waveguide and fastest photodiode implemented in a commercial CMOS technology without performing any post-processing. The measured waveguide loss at 1.55µm is 37dB/cm and bandwidth of photodiode exceeds 9.2GHz at 850nm.

© 2013 Optical Society of America

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