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Optica Publishing Group
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2011
  • OSA Technical Digest (CD) (Optica Publishing Group, 2011),
  • paper OMV3
  • https://doi.org/10.1364/OFC.2011.OMV3

Compact, Thermally-Tuned Resonant Ring Muxes in CMOS with Integrated Backside Pyramidal Etch Pit

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Abstract

We present add-drop filters manufactured as ring resonators in commercial 130 nm SOI CMOS technology with thermal tuning. Their thermal impedance has been dramatically increased by the selective removal of the substrate resulting in a 20, 12× increase in tuning efficiency for 100, 30 micron radius device.

© 2011 Optical Society of America

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