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Conferences > OFC > 2005 > OThD > OThD2
  • Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper OThD2

Micro-Machined XY Stage for Fiber Optics Module Alignment

Marc Epitaux, Jean-Marc Verdeil, Yves Pétremand, Wilifried Noell, and Nicoolas F. De Rooij

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Abstract

A novel Silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. MEMS micro-alignment method and Silicon chip design are described. Finally the micro-fabricated device performance is discussed.

© 2005 Optical Society of America

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