Abstract
In this paper we describe tunable interference filters based on arrays of MEMS micromirrors. A simple analytical description of the height distribution of micromirrors needed to create a desired spectral response is presented, and the implications on the design and utility of MEMS interference filters are discussed. Finally we describe two practical filter implementations. The first enables continuous spectral control over relatively broad bands, and the second is designed for Wavelength-Division-Multiplexed fiber optic communication systems.
© 2004 Optical Society of America
PDF ArticleMore Like This
R. Belikov, X. Li, and O. Solgaard
CThA1 Conference on Lasers and Electro-Optics (CLEO:S&I) 2003
Zhenguo Wang, Tuqiang Xie, and Yingtian Pan
FH34 Biomedical Topical Meeting (BIOMED) 2004
U. Poornalakshmi, Somya Agarwal, M. Balasubramanian, and Prasant Kumar Pattnaik
26I1_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2015