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Conferences > OFC > 2003 > WM > WM1
  • Optical Fiber Communication Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper WM1

Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

I. Brener, P. Chu, M. Tsai, C. Pu, M. Chou, J. Dadap, D. Lee, B. Tang, D. Peale, N. Bonadeo, R. Harel, C. Wu, J. Johnson, S. Park, S. Lee, D. Tong, R. Doran, K. Bergman, T. Chau, E. Goldstein, L. Lin, J. Walker, W. Zhong, and R. Gibson

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Abstract

We demonstrate full closed-loop control of elec-trostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical cross-connect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.

© 2003 Optical Society of America

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