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  • Optical Fiber Communication Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper WF5

New All 2-inch Manufacturable High Performance Evanescent Coupled Waveguide Photodiodes with Etched Mirrors for 40 Gb/s Optical Receivers

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Abstract

Evanescent PIN photodiodes are fabricated using all 2"-InP processing including on-wafer mirrors and coatings. 0.73 A/W responsivity at 1.55 µm, −1 dB vertical coupling tolerance of 2.2 µm and 47 GHz bandwidth are simultaneously demonstrated.

© 2003 Optical Society of America

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