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Optica Publishing Group
  • Optical Fiber Communication Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper PD36

Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect

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Abstract

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000x1000-port optical cross-connect switch.

© 2003 Optical Society of America

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