Abstract
We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000x1000-port optical cross-connect switch.
© 2003 Optical Society of America
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