Abstract

There has been a growing interest and excitement about MEMS technology (Micro-Electro-Mechanical Systems) since the introduction of the first commercial parts in the early 1990’s. These early devices were mostly accelerometers used for triggering automobile air bags. In the subsequent years, there have been many other MEMS devices commercialized; most notably, the micromirror display device from Texas Instruments.¹

© 2002 Optical Society of America