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Optica Publishing Group
  • Optical Fiber Communication Conference
  • 1998 OSA Technical Digest Series (Optica Publishing Group, 1998),
  • paper WH7

Directly UV written silica-on-silicon planar waveguides with low insertion loss

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Abstract

The fabrication techniques currently used for production of silica-based planar waveguides often rely on photolithography and reactive ion etching.

© 1998 Optical Society of America

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