Abstract

The deformable mirror device (DMD) is a spatial light modulator . that offers both amplitude and phase modulation. The DMD is built on a silicon substrate and consists of small mirror elements (pixels) suspended above addressing electrodes via one or more small hinge. The pixels are deflected by electrostatic attraction created by applying a potential difference between the mirror element and addressing electrode.¹ Both area array and linear DMDs have been built and been used in several areas.^2-4

© 1990 Optical Society of America