The energy stability of 266nm laser is a key factor for an electron accelerator. We report on the shot to shot energy stability of second and third harmonic generation (THG) by using sub-100-fs idler laser pulses. A maximum energy conversion as high as 25% from the fundamental to the third harmonic generation is achieved by phase and group velocity matching (Type I). The influence of energy and pulse duration of the idler wave has been studied. The THG stability varies from 0.135%~2.94% by changing the idler pulse energy in the experiments.
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