Abstract
Monolithic photonic integrated circuit consisting of firstorder mode splitter and Ge photodiode is designed, fabricated and characterized for optical performance monitoring of Si Mach-Zehnder modulator. First-order mode splitter is Si waveguide directional coupler with coupling length as short as 16 m, allowing efficient transfer of first-order mode from main waveguide to sub waveguide. Evanescent-coupling Ge photodiode is fabricated on the sub waveguide. Optical performance monitoring is confirmed with responsivity higher than 50 mA/W in C and L bands.
© 2013 IEICE
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