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Performance Characterization of High-Speed InAlAs Avalanche Photodiode with Double Passivation

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Abstract

We fabricated high speed InAlAs avalanche photodiode without guard ring. It demonstrated the dark current of 1.9 nA and capacitance of 0.16 pF at 0.9 Vbr, and f3-dB of 10 GHz under different incident optical-powers.

© 2021 The Author(s)

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