Abstract
Polyetherimide (PEI) material was adopted for the ultra small optical disk substrates. The pattern transcribability and the mechanical property of a vibration were measured and compared with conventional polycarbonate substrates. PEI substrates showed the same pattern transcribability as conventional substrates. However, the vibration characteristic of the new substrates was superior to the conventional substrates.
© 2003 Optical Society of America
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