Abstract

High density mastering is the key technology for the next generation optical disc production, and electron beam recorder (EBR) was proposed to produce higher density pit patterns for more than 25GB recording capacity.¹⁾ As reported previously, we developed an electron beam recorder capable of recording master discs in the atmosphere by the use of a novel differential pumping head, and confirmed an acceptable RF signal of 50GB recording capacity readout by a near field optical pick-up.^2-5) In this paper, we report the improvement of 50GB density recording performance using the EBR and Si etching process optimization and the some result of recording up to 100GB density (69.5Gbit/in²).

© 2003 Optical Society of America