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Athermal Travelling Wave Mach-Zehnder Modulators for Optical Interconnects

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Abstract

We design a PN junction-based Travelling Wave Mach-Zehnder modulator with an air- filled deep trench region to enhance the electro-optic bandwidth. A data rate up to 50 Gbps has been achieved without deploying any pre-compensation.

© 2021 The Author(s)

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