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Conferences > Networks > 2018 > NeM4F > NeM4F.1

Surface Micromachined Silicon Photonic MEMS: A Scalable Technology Platform for Photonic Network Components

Niels Quack, Tae Joon Seok, Sangyoon Han, Hamed Sattari, Teodoro Graziosi, Marcell Kiss, Richard S. Muller, and Ming C. Wu

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Abstract

Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.

© 2018 The Author(s)

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