Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

Not Accessible

Your library or personal account may give you access

Abstract

On-wafer probing of optical signals offers powerful means for assessing the fabrication process quality of photonic integrated circuits. We describe the fabrication and characterization of a vertical optical coupler that enables on-wafer probing.

© 2013 Optical Society of America

PDF Article
More Like This
Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R. Santos, D. D’Agostino, F. M. Soares, H. Rabbani Haghighi, M. K. Smit, and X. J. M. Leijtens
IM3A.3 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2014

Butt-Coupling Optical Probe Card for Wafer-Scale Photonic-Integrated-Circuits Test with Polarization Control

Cheng-Yu Wu, Ming-Chang M. Lee, Mei-Ju Lu, Sin-Yuan Mu, Jihan Chen, and Chia-Sheng Cheng
ck_p_40 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

Integrated Photonic Circuits on Wafer-Scale Diamond-on-Insulator Substrates

Patrik Rath, Christoph Nebel, Christoph Wild, and Wolfram H.P. Pernice
CTu1F.2 CLEO: Science and Innovations (CLEO:S&I) 2013

Poster Presentation

Media 1: PDF (6785 KB)     
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved