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Pressure Sensing Based on Ratiometric Bragg Grating Loss in a Planar Silica Diaphragm Platform

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Abstract

In this paper the first demonstration of a planar silica-on-silicon chip pressure sensor based on monitoring ratiometric Bragg grating amplitude loss across a diaphragm is made. The device resolution was found to be 0.46 kPa.

© 2018 The Author(s)

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