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Microring Resonators and Photonic Crystal Structures in Ion-Sliced LiNbO3 Thin Films

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Abstract

We report on the realization of electro-optically tunable microring resonators and photonic crystal structures in ion-sliced lithium niobate thin films. The fabricated microresonators exhibit FSR > 7 nm, Q ≈ 10’000, and a tunability of 1 pm/V. Our novel technique enables also the fabrication of free-standing lithium niobate microrings suitable for hybrid optical integration. Combining laser lithography and focused ion beam milling we realized photonic bandgap structures exhibiting an extinction ratio of up to 15 dB at wavelengths around 1500 nm.

© 2010 Optical Society of America

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