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Conferences > NOMA > 2018 > NoW1J > NoW1J.7

Surface topography studied by off-axis digital holography

E. Achimova, V. Abaskin, V. Cazac, A. Meshalkin, G. Pedrini, D. Claus, I. Shevkunov, and V. Katkovnik

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Abstract

The topography of surface relief gratings patterned on As2S3–Se nanomultilayers was investigated by digital holographic microscopy. For the high-accuracy phase reconstruction of the topography we used the sparse wavefront modeling. Experimental results are presented.

© 2018 The Author(s)

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