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Conferences > NOMA > 2018 > NoTh3D > NoTh3D.3

Refractive Index Sensing by High Aspect Ratio Titanium Nitride Trench Structures

Evgeniy Shkondin, Taavi Repän, Andrei V. Lavrinenko, and Osamu Takayama

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Abstract

Titanium nitride grating structures are fabricated by a combination of deep reactive ion etching and atomic layer deposition. Such structures being analyzed as an ambient medium sensor, exhibit the refractive index sensitivity of 430 nm/RIU.

© 2018 The Author(s)

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