The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.
© 2018 The Author(s)
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription