Al and In codoped zinc oxide thin films were fabricated on glass substrates by the ultrasonic spray pyrolysis technique. Structural, optical, electrical, and morphological characteristics were studied with respect to dopants concentration. The lowest electrical resistivity was around 1.7×10−3ohm-cm, whereas maximum optical transmittance of 85% was obtained, characteristics favorable for transparent conductive oxide (TCO) applications.

© 2016 Optical Society of America

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