We report the fabrication of x-ray spiral zone plates (SZPs). Gold patterns were first fabricated on suspended membrane employing electron beam lithography, and then used as a mask to obtain the SZPs by x-ray lithography.
© 2016 Optical Society of America
This paper was not presented at the conference
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription