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Phase-Matched Extreme-Ultraviolet Frequency-Comb Generation

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Abstract

We achieve phase-matched high-harmonic generation at 77 MHz repetition rate, by using high-temperature gas mixtures to increase gas-jet velocity and reduce plasma accumulation. We generate record power of ~2mW at 97nm and ~0.9mW at 67nm.

© 2019 The Author(s)

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